高g值微机电系统加速度传感器可靠性的相场分析方法

Phase-Field Analysis Method for the Reliability of High-g Micro-Electro-Mechanical System Accelerometers

摘要

针对高g值（g为重力加速度）微机电系统（MEMS）加速度传感器在极端冲击环境下的结构失效问题，提出了一种利用相场断裂模型的可靠性分析方法。该方法以相场断裂理论为基础，构建了包含失效形式识别、裂纹演化仿真、结构改进与再验证的可靠性分析流程。通过静力学与瞬态分析，并结合相场断裂模型，对裂纹萌生与扩展的微尺度过程进行了定量化与可视化表征，并与三维高g值冲击试验结果进行了对比验证。在此基础上，针对扭转梁根部的高应力集中区域提出了圆角改进设计，并通过静力、瞬态再分析以及相场断裂的对比验证，完成改进方案的抗断裂性能评估。研究结果表明：扭转梁根部存在显著的应力集中现象，是裂纹萌生与扩展的主导区域，由此揭示了应力集中与裂纹演化之间的关联。所提出的梁根圆角改进设计使应力集中降低了约18%，裂纹扩展延迟了约40%，从而提高了传感器在高g值冲击工况下的抗断裂可靠性。该研究为高g值MEMS加速度传感器的可靠性分析提供了一种解决方案。

Abstract

To address structural failures in high-g micro-electro-mechanical system (MEMS) accelerometers under extreme shock environments, a reliability analysis method using the phase-field fracture model was proposed. Based on phase-field fracture theory, a reliability analysis workflow encompassing failure mode identification, crack evolution simulation, structural improvement, and re-validation was established. The micro-scale processes of crack initiation and propagation were quantitatively and visually characterized through static and transient analyses combined with a phase-field fracture model. The numerical results were comparatively validated against three-dimensional high-g shock test results. On this basis, a fillet improvement design was proposed for the high stress concentration region at the torsion-beam root, and the fracture resistance of the improved scheme was evaluated via static and transient re-analysis together with phase-field fracture-based comparative validation. The results indicate that pronounced stress concentration at the torsion-beam root is the dominant region governing crack initiation and propagation, thereby revealing the relationship between stress concentration and crack evolution. The proposed beam-root fillet improvement design reduces stress concentration by approximately 18% and delays crack propagation by about 40%, thus improving the fracture resistance reliability of the sensor under high-g impact conditions. This study provides a feasible solution for the reliability analysis of high-g MEMS accelerometers.

关键词

微机电系统加速度传感器 / 高g值冲击 / 相场断裂模型 / 可靠性分析

Key words

micro-electro-mechanical system accelerometer / high-g shock / phase-field fracture model / reliability analysis

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基金资助

国家科技重大专项资助项目(2025ZD1401600)

安徽省微机电系统（MEMS）技术产业创新研究院创新课题()