基于双光子聚合技术的微纳结构增材制造与压缩性能研究

Additive manufacturing and compression of micro/nano-structures based on two-photon polymerization technology

摘要

双光子聚合（two-photon polymerization，TPP）制造技术具备100 nm的打印精度，是实现微纳尺度复杂结构高质量、高精度制备的强大工具。然而，面向TPP增材制造的材料基本属性及打印工艺参数对结构的影响仍未明确，限制了其在复杂性能需求设计中的应用。因此，本研究给出了详细的打印及测试流程。针对典型试件研究了光敏聚合物树脂IP系列中的IP-Dip材料的最佳打印工艺，给出了激光功率、扫描速度等不同参数的设置参考。应用获得参数进行立杆和晶格结构的制备，通过原位SEM/FIB纳米力学性能测试系统进行样件单轴压缩试验，给出了材料的压缩模量，并给出了微纳级点阵结构在压缩过程中分层破坏及卸载回弹的压缩曲线。

Abstract

Two-photon polymerization (TPP) manufacturing technology with 100 nm printing accuracy is a powerful tool for high-quality and high-precision fabrication of complex structures at micro- and nano-scales. However, the basic properties of materials and optimal printing process for TPP additive manufacturing are still not clear, which limits its application in complex performance requirements design. Therefore, this paper studies the optimal printing process of photosensitive polymer resin (IP-Dip) material of typical experimental test samples and gives the setting of different parameters such as laser power and writing speed. The micron-scale pillar and lattice structure were printed, and the uniaxial compression test of the sample was carried out by the SEM/FIB nano-mechanical testing system. The Young's modulus of the material was given, and it was found that the nano-scale lattice structure had typical delamination failure and unloading rebound phenomenon during the compression process.

关键词

双光子聚合技术 / 增材制造 / 光敏聚合树脂IP-Dip / 压缩测试 / 微纳结构

Key words

two-photon polymerization technology / additive manufacturing / photosensitive polymeric resin IP-Dip / compression test / micro/nano-structure

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基金资助

国家留学基金委资助项目(201906060124)