[Author(id=1197021529176421133, tenantId=1045748351789510663, journalId=null, articleId=1160184162398429482, orderNo=null, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=null, email=null, emailSecond=null, emailThird=null, correspondingAuthor=null, authorType=null, ext={CN=AuthorExt(id=null, tenantId=null, journalId=1155139928303341817, articleId=1160184162398429482, authorId=1197021529176421133, language=CN, stringName=李萍, 张宝玉, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=null, address=null, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=null)]
李萍, 张宝玉.
碳化硅晶圆化学机械抛光工艺优化[J].
电镀与涂饰, 2025, 44(03): 127-132 DOI:10.19289/j.1004-227x.2025.03.017