高强极薄电解铜箔用一体式阳极槽结构设计与制造

Structural design and manufacturing of integrated anode tank for high-strength ultra-thin electrolytic copper foil

摘要

[目的] 针对高强极薄电解铜箔对厚度均匀性及表面品质的严苛要求，探讨一体式阳极槽的结构设计与精度控制，为其高性能制造提供设备支撑。[方法] 通过分析电解生箔机工作原理、电场分布及生箔过程控制要点，阐明阳极槽在铜箔沉积中的关键作用；重点剖析纯钛一体式阳极槽的结构设计细节，包括阳极支撑板、进液组件、密封结构的设计要点；同时阐述精密制造工艺中的应力控制方法及工作圆弧面精加工技术；通过多点测量优化前后阳极槽内弧面尺寸精度，采用标准差、极差、合格率及过程能力指数等统计指标进行量化评估。[结果] 采用一体式结构设计与精密制造工艺后，直径 2 000 mm 和直径 2 700 mm 阳极槽的内弧面尺寸均匀性分别提升约 31.8%和 28.0%，整体精度稳定控制在±0.15 mm 以内，尺寸偏差不高于 ±0.1 mm 的合格率分别达到 96.6%和 91.7%。[结论] 阳极槽的结构刚性、尺寸精度及稳定性是保障高强极薄电解铜箔厚度均匀性与表面品质的核心，其精密化制造是提升铜箔品质的关键路径。

Abstract

[Objective] To address the stringent requirements of high-strength ultra-thin electrolytic copper foil for thickness uniformity and surface quality, the structural design and precision control of an integrated anode tank need to be studied to provide equipment support for its high-performance manufacturing. [Method] By analyzing the working principle of the electrolytic copper foil machine, electric field distribution, and key control points of the foil deposition process, the critical role of the anode tank in copper foil deposition was clarified. The structural design details of the pure titanium integrated anode tank were thoroughly examined, including the design essentials of the anode support plate, liquid inlet assembly, and sealing structure. In addition, the stress control methods in the precision manufacturing process and the finishing technology of the working arc surface were described. The dimensional accuracy of the inner arc surface of the anode tank before and after optimization was measured at multiple points, and statistical indicators such as standard deviation, range, pass rate, and process capability index were used for quantitative evaluation. [Result] After adopting the integrated structural design and precision manufacturing process, the dimensional uniformity of the inner arc surface of the anode tanks with diameters of 2 000 mm and 2 700 mm was improved by approximately 31.8% and 28.0%, respectively. The overall precision was stably controlled within ±0.15 mm, and the pass rate (with dimensional deviation not exceeding ±0.1 mm) reached 96.6% and 91.7%, respectively. [Conclusion] The structural rigidity, dimensional accuracy, and stability of the anode tank are the key factors ensuring the thickness uniformity and surface quality of high-strength ultra-thin electrolytic copper foil. Precision manufacturing of the anode tank is the critical path to improving copper foil quality.

关键词

电解铜箔 / 一体式阳极槽 / 结构设计 / 精密制造 / 厚度均匀性

Key words

electrolytic copper foil / integrated anode tank / structural design / precision manufacturing / thickness uniformity

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基金资助

陕西省重点项目(2022SSPY-06)