SiO_X/TPGDA/SiO_X“三明治”结构型高阻隔薄膜构建及其水氧阻隔性能

Construction and performance of high barrier films with SiO_X/TPGDA/SiO_X “sandwich” structure for water-oxygen barrier properties

摘要

采用卷对卷等离子化学气相沉积（roll-to-roll plasma chemical vapor deposition，roll-to-roll PECVD）、卷对卷蒸发镀膜技术（roll-to-roll evaporation coating technology）制备SiO_X/TPGDA/SiO_X“三明治”结构型叠层薄膜，使用硅烷偶联剂及离子源表面活化提高无机层SiO_X与有机层TPGDA之间的界面结合力，研究叠层薄膜的制备技术及其力学性能、阻隔性能及光学性能。结果表明：SiO_X/TPGDA/SiO_X“三明治”结构型阻隔膜纵向拉断力F_1L为174.17 N，应变ε_L为112%，横向拉断力F_1H及应变ε_H分别为159.86 N与135%。阻隔膜水蒸气透过率低至0.1 g·m⁻²·day⁻¹，经过双“85”实验后仍保持较好的阻水性能，并且阻隔膜透光率及雾度分别达89.2%和1.05%，在未来空间站食品包装储存、太阳能电池板封装，导弹弹药中敏感材料防潮及雷达红外遥感中精密部件防潮等航空航天军事领域有潜在的应用前景。

Abstract

SiO_X/TPGDA/SiO_X sandwiched films are fabricated by roll-to-roll plasma vapor deposition (roll-to-roll PECVD) and roll-to-roll evaporation coating technology. Silane coupling agent and ion source treatment for surface activation are employed to enhance the interface bonding force between the inorganic layer SiO_X and the organic layer TPGDA. The preparation technology，mechanical properties，barrier properties and optical properties of laminated films are investigated. The results indicate that the longitudinal breaking force F_1L and strain ε_L of SiO_X/TPGDA/SiO_X “sandwich” structural barrier film are 174.17 N and 112%，respectively，and the transverse breaking force F_1H and strain ε_H are 159.86 N and 135%，respectively. The water vapor transmission rate of the barrier film is as low as 0.1 g·m⁻²·day⁻¹，and it still maintained good water resistance performance after the double “85” experiment. Moreover，the light transmittance and haze of the barrier film are 89.2% and 1.05%，respectively. This technology holds promising application potential in aerospace and military sectors, including but not limited to: future space station food packaging and storage, encapsulation of solar panels, moisture-proofing of sensitive materials in missiles and ammunition, as well as protection of precision components in radar and infrared remote sensing systems against humidity.

关键词

连续卷绕 / 叠层薄膜 / SiO_X / TPGDA / 阻水性 / 阻氧性 / 力学性能 / 透光性

Key words

roll-to-roll / laminated film / SiO_X / TPGDA / water resistance / oxygen inhibition / mechanical property / light transmittance

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基金资助

国家重点研发计划(2022YFB3806300)