飞秒激光诱导周期性表面结构的特征与调控

Characteristics and control of femtosecond laser-induced periodic surface structures

摘要

飞秒激光诱导周期性表面结构（laser-induced periodic surface structures，LIPSS）能够显著提升金属材料的耐磨性、润湿性及自清洁性能，为表面功能化改性提供新途径。以 1Cr18Ni10Ti 不锈钢为对象，系统探究激光能量密度、光斑搭接率及扫描次数对 LIPSS 形貌特征的影响规律。结果表明，在多脉冲条件下，增大激光能量密度可提高低空间频率（low-spatial frequency LIPSS，LSFL）LIPSS 的尺寸与周期，但能量密度过高会导致高空间频率（high-spatial frequency LIPSS, HSFL）LIPSS 均匀性下降甚至结构破坏；光斑搭接率增加促使 LIPSS 形貌从条纹状 HSFL 逐步过渡为 HSFL/LSFL 复合结构，最终形成包状 LSFL，其尺寸随搭接率提升而显著扩大；扫描次数增加虽类似能量密度增大的效果，但可进一步提升 HSFL 的分布均匀性，且避免对其结构的破坏。单脉冲实验中，LIPSS 的空间周期由光斑中心向外逐渐降低，且中心区域周期随能量密度增加而增大，揭示了表面结构化与熔融效应耦合作用的机理。研究结果为飞秒激光诱导 LIPSS 的形貌调控优化提供关键理论支撑，可推动该技术在航空材料领域的应用。

Abstract

Femtosecond laser-induced periodic surface structures (LIPSS) can significantly enhance the wear resistance，wettability，and self-cleaning capabilities of metallic materials，providing a novel approach for functional surface modification. This study systematically investigates the effects of laser fluence，spot overlap rate，and scanning passes on the morphological characteristics of LIPSS on 1Cr18Ni10Ti stainless steel. Experimental results indicate that under multi-pulse conditions，increasing the laser fluence enlarges the dimensions and periodicity of low-spatial frequency (LSFL) LIPSS， but excessively high fluence degrades the uniformity or even damages high-spatial frequency (HSFL) LIPSS. Increasing the spot overlap rate induces a morphological transition of LIPSS from stripe-like HSFL to a composite structure of HSFL/LSFL，ultimately forming aggregated LSFL clusters with expanded dimensions. Additional scanning passes mimic the effect of higher fluence while improving HSFL distribution uniformity without structural damage. In single-pulse experiments，the spatial period of LIPSS decreases radially from the spot center，and the central period increases with higher fluence，revealing the coupling mechanism of surface structuring and melting effects. These findings provide critical theoretical support for the morphological control of LIPSS，advancing the application of femtosecond laser technology in aerospace materials.

关键词

飞秒激光 / 激光诱导表面周期性结构 / 形貌特征 / 调控机制

Key words

femtosecond laser / laser-induced periodic surface structure / morphological feature / control mechanism

参考文献

[1] Park M，Gu Y R，Mao X L，et al. Mechanisms of ultra—fast GHz burst fs laser ablation[J].Science Advances，2023，9（12）：6397.

[2] Wang H，Jürgensen J，Decker P，et al. Corrosion behavior of NiTi alloy subjected to femtosecond laser shock peening without protective coating in air environment[J].Applied Surface Science，2020，501：144338.

[3] Bai X，Yang Q，Fang Y，et al. Superhydrophobicity—memory surfaces prepared by a femtosecond laser[J].Chemical Engineering Journal，2020，383：123143.

[4] Vercillo V，Tonnicchia S，Romano J M，et al. Design rules for laser—treated icephobic metallic surfaces for aeronautic applications[J].Advanced Functional Materials，2020，30（16）：1910268.

[5] Ageev E I，Andreeva Y M，Ionin A A，et al. Single—shot femtosecond laser processing of Al—alloy surface：an interplay between Mbar shock waves，enhanced micro—hardness，residual stresses，and chemical modification[J].Optics & Laser Technology，2020，126：106131.

[6] Kawashima T，Sano T，Hirose A，et al. Femtosecond laser peening of friction stir welded 7075—T73 aluminum alloys[J].Journal of Materials Processing Technology，2018，262：111-122.

[7] Lu C H，Ge L C，Zhu B，et al. Effective femtosecond laser shock peening on a Mg—3Gd alloy at low pulse energy 430 µJ of 1 kHz[J].Journal of Magnesium and Alloys，2019，7（3）：529-535.

[8] Arefev M I，Shugaev M V，Zhigilei L V. Kinetics of laser—induced melting of thin gold film：how slow can it get?[J].Science Advances，2022，8（38）：2621.

[9] Skoulas E，Manousaki A，Fotakis C，et al. Biomimetic surface structuring using cylindrical vector femtosecond laser beams[J].Scientific Reports，2017，7：45114.

[10] Tsibidis G D，Skoulas E，Stratakis E. Ripple formation on nickel irradiated with radially polarized femtosecond beams[J].Optics Letters，2015，40（22）：5172.

[11] Romano J M，Garcia—Giron A，Penchev P，et al. Triangular laser—induced submicron textures for functionalising stainless steel surfaces[J].Applied Surface Science，2018，440：162-169.

[12] Fraggelakis F，Mincuzzi G，Lopez J，et al. Controlling 2D laser nano structuring over large area with double femtosecond pulses[J].Applied Surface Science，2019，470：677-686.

[13] Albu C，Dinescu A，Filipescu M，et al. Periodical structures induced by femtosecond laser on metals in air and liquid environments[J].Applied Surface Science，2013，278：347-351.

[14] Wang C，Huo H B，Johnson M，et al. The thresholds of surface nano—/micro—morphology modifications with femtosecond laser pulse irradiations[J].Nanotechnology，2010，21（7）：075304.

[15] Schille J，Schneider L，Kraft S，et al. Experimental study on double—pulse laser ablation of steel upon multiple parallel—polarized ultrashort—pulse irradiations[J].Applied Physics A，122（7）：644.

[16] Mannion P T，Magee J，Coyne E，et al. The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro—machining of common metals in air[J].Applied Surface Science，2004，233（1—4）：275-287.

[17] Pietroy D，Di Maio Y，Moine B，et al. Femtosecond laser volume ablation rate and threshold measurements by differential weighing[J].Optics Express，2012，20（28）：29900.

[18] Orzi D J O，Alvira F C，Bilmes G M. Determination of femtosecond ablation thresholds by using laser ablation induced photoacoustics （LAIP）[J].Applied Physics A，2013，110（3）：735-739.

[19] 杨明. 飞秒激光诱导硅表面微纳结构研究[D]. 天津：南开大学，2014.

[20] Yang M. Study on micro—nano structure of silicon surface induced by femtosecond laser[D]. Tianjin：Nankai University，2014.

[21] Tsibidis G D，Skoulas E，Papadopoulos A，et al. Convection roll—driven generation of supra—wavelength periodic surface structures on dielectrics upon irradiation with femtosecond pulsed lasers[J].Physical Review B，2016，94（8）：081305.

基金资助

中国航空发动机集团产学研合作项目(HFZL2021CXY024-2)

国家自然科学基金青年基金(52405240)

国家重点研发计划(2024YFB4609000)

国家科技重大专项(J2019-Ⅳ-0014-0082)

陕西省杰出青年科学基金项目(2023-JC-JQ-37)