基于先驱体陶瓷的耐高温厚膜温度传感器

High Temperature Resistant Thick Film Temperature Sensors Based on Precursor Ceramics

摘要

先驱体陶瓷厚膜传感器可以用于发动机叶片、化工厂等高温场合，然而先驱体陶瓷在高温下缓慢氧化，影响高温电学稳定性，从而使得先驱体陶瓷厚膜传感器耐温不足。针对先驱体陶瓷厚膜传感器耐温不足的问题，本文设计了一种先驱体陶瓷厚膜传感器，该传感器厚度约为60μm，采用直写打印的方法制备了该先驱体陶瓷厚膜传感器，经过多轮温阻测试，分析了其高温重复性、稳定性和灵敏度，发现其1000℃高温重复性、稳定性良好，具有一定的灵敏度。提供了一种耐温1000℃的温度传感器的制备方法。

Abstract

Precursor ceramic thick-film sensors can be used in high-temperature applications such as engine blades, chemical plants, etc. However, precursor ceramics oxidize slowly at high temperatures, which affects the electrical stability at high temperatures, thus making the precursor ceramic thick-film sensors insufficiently temperature-resistant. For the problem of insufficient temperature resistance of the precursor ceramic thick film sensor, this paper designs a precursor ceramic thick film sensor, which has a thickness of about 60 μm, and the precursor ceramic thick film sensor is prepared by the method of direct writing and printing, and its high temperature reproducibility, stability, and sensitivity are analyzed after several rounds of temperature resistance testing, and its high temperature repeatability, stability, and sensitivity are found to be good at a high temperature of 1000℃, and it has a certain sensitivity. A method of preparing a temperature sensor with a temperature resistance of 1000℃ is provided.

关键词

先驱体陶瓷 / 耐高温 / 厚膜 / 温度传感器

Key words

precursor ceramics / high temperature resistant / thick film / temperature sensors

参考文献

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