Cr-Ni复合靶材PVD沉积薄膜的颜色多样性及耐腐蚀性协同提升研究

Study on Synergistic Enhancement of Color Diversity and Corrosion Resistance in Cr-Ni Composite Target PVD Coated Films

摘要

在装饰防护领域应用广泛的由物理气相沉积技术制备的铬镍薄膜，实现颜色多样性与耐腐蚀性的协同提升仍是挑战。本研究旨在通过优化Cr-Ni复合靶材的磁控溅射工艺参数，探究薄膜光学性能与耐腐蚀性能的协同增强机制，采用不同Cr/Ni比例的复合靶材，通过系统调控溅射功率与工作气压制备系列薄膜样品，利用分光光度计和电化学工作站分别表征其颜色坐标与耐腐蚀性能，并结合扫描电子显微镜分析薄膜微观结构。结果表明，在特定工艺条件下获得的薄膜兼具丰富的色彩表现和优异的耐腐蚀性，其协同提升机制归因于致密的微观结构和优化的元素分布，为高性能装饰防护薄膜的开发提供了有效策略。

Abstract

The development of chromium-nickel (Cr-Ni) thin films through physical vapor deposition (PVD) technology for decorative protection applications remains challenging, particularly in achieving simultaneous enhancement of color diversity and corrosion resistance. This study investigates the synergistic mechanism between optical performance and corrosion resistance by optimizing magnetron sputtering parameters of Cr-Ni composite targets. Through systematic adjustments of sputtering power and working gas pressure, a series of thin film samples with varying Cr/Ni ratios were fabricated. Their color coordinates and corrosion resistance were characterized using spectrophotometers and electrochemical workstations, with scanning electron microscopy (SEM) analyzing the microstructures. Results demonstrate that films under optimized conditions exhibit both rich chromaticity and exceptional corrosion resistance. This synergistic improvement is attributed to dense microstructures and optimized elemental distribution, providing effective strategies for developing high-performance decorative protective films.

关键词

Cr-Ni复合靶材 / 物理气相沉积 / 颜色多样性 / 耐腐蚀性 / 协同提升

Key words

Cr-Ni composite target / physical vapor deposition / color diversity / corrosion resistance / synergistic enhancement

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